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How to select the vacuum pump

Time:2015-11-12  Click:384

Selection of vacuum pump, the need to pay attention to the following matters:

1, the working pressure of the vacuum pump should meet the vacuum equipment and working pressure. Such as: vacuum coating requirements of 1 x 10-5mmHg vacuum, the vacuum pump selection of at least 5 x 10-6mmHg. The vacuum degree of the pump is usually higher than that of the vacuum equipment.

2, the correct choice of the vacuum pump working point. Each pump has a certain working pressure range, such as: diffusion pump 10-3~10-7mmHg. In such a wide range of pressure and pump pumping speed change with pressure, working pressure range of stability of the for 5 x 10-4~5 * 10-6mmHg. Therefore, the pump operating point should be chosen in this range, and can not let it work under the 10-8mmHg. And as the titanium sublimation pump can work under 10-2mmHg, but its working pressure should be less than 1 * 10-5mmHg as well.

3, the vacuum pump in the working pressure, should be able to exhaust the vacuum equipment to produce all the gas volume.

4, the correct combination of vacuum pump. Because the vacuum pump has the selective pumping gas, therefore, sometimes the choice of a pump can not meet the requirements of pumping gas, the need to combine several pumps, complement each other to meet the pumping requirements. Such as titanium sublimation pump of hydrogen have very high pumping speed, but not pumping helium, and the triode sputtering ion pump, (or bipolar type non symmetrical cathode sputter ion pump) on a certain argon pumping speed, the two together will make the vacuum device to get a better vacuum degree. The other and some vacuum pump can work in high pressure and need to pre vacuum; some pump outlet pressure below atmospheric pressure, need to pre stage pump, ancient capital of the need to combine the use of pumps.

5, vacuum equipment for oil pollution requirements. If the equipment is strictly required no oil, should choose a variety of non oil pump, such as: water ring pump, molecular sieve adsorption pump, sputter ion pump, low temperature pump, etc.. If the requirement is not strict can choose a pump, plus on a number of oil pollution prevention measures, such as cold trap, baffle, oil wells, etc., also can achieve clean vacuum requirements.

6, to understand the smoke gas composition, gas containing non - containing gas, there is no particles of dust, corrosive, etc.. When selecting a vacuum pump, you need to know the composition of the gas. If the gas contains steam, particles, and corrosive gases, it should be considered in the pump inlet pipe on the installation of auxiliary equipment, such as condenser, dust collector, etc..

7, vacuum pump exhaust gas to the environment, how the impact. If the environment does not allow pollution, you can choose a non oil vacuum pump, or the oil vapor into the outdoor.

8, the vibration of the vacuum pump is not affected by the process and environment. If the process is not allowed, we should choose the non vibration pump or take the anti vibration measures.

9, vacuum pump prices, operation and maintenance costs.

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